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2波長による紫外線とオゾンのダブル効果で有機汚染物質を除去
UVオゾンクリーナー
製品情報 / 製品ラインナップ / テクニカルデータ

※ダメージフリーの乾式洗浄法で、基板に付着している有機汚染物質を、光化学的酸化分解プロセスによって除去できます。

テクニカルデータ


洗浄テスト


【洗浄例(本装置による汚染ガラス基板の洗浄経緯)】

UVオゾン洗浄の時間を変えたガラス基板上に、Milli-Q水を滴下した写真
(左はUV洗浄なし、真ん中はUV洗浄15分、右はUV洗浄時間30分)

洗浄例
UVオゾン洗浄により、基板がきれいになり、親水性が高くなったことがわかります。

【エスカによる洗浄力テスト】


論文及び技術資料


1. Motohiro Kageyama, Yuichi Nishida, Narumi Tagaki, Noboru Suzuki, Teiji Kato, Norihiro Kato, Ken-ichi Iimura, Surface Modification of Self-assembled Monolayers of Thiol- and Disulfide-terminated Organosilanes by UV/ozone Treatment toward Fabrication of Damaged-Hair Surface Models, Trans. Mat. Res. Soc. Japan 39[1]61-65(2014)
2. Yoshihiro Kikkawa, Masato Fukuda, Nobuhiro Ichikawa, Ayumi Kashiwada, Kiyomi Matsuda, Masatoshi Kanesato, Tomohiro Hiraishi, Tuning the enzymatic hydrolysis of biodegradable polyesters and it’s application to surface patterning, Journal of Materials Chemistry A Issue 15, 2013
3. Yuta Morinaka, Masahiro Nobori, Michihisa Murata, Atsushi Wakamiya, Takashi Sagawa, Susumu Yoshikawa, and Yasujiro Murata, Synthesis and photovoltaic properties of acceptor materials based on the dimerization of fullerene C60 for efficient polymer solar cells, Chem. Commun., 2013,49, 3670-3672
4. Yong-Hoon Kim, Jae-Sang Heo, Tae-Hyeong Kim, Sungjun Park, Myung-Han Yoon, Jiwan Kim, Min Suk Oh, Gi-Ra Yi, Yong-Young Noh & Sung Kyu Park, Flexible metal-oxide devices made by room-temperature photochemical activation of sol-gel films, Nature 489, 128-132 (06 September 2012)
5. Michihisa Murata, Yuta Morinaka, Yasujiro Murata, Osamu Yoshikawa, Takashi Sagawa, and Susumu Yoshikawa, Modification of σ-framework of [60]fullerene for bulk-heterojunction solar cells, Chem Commun (Camb). 2011 Jul 47, 7335-7337
6. Seong-Ho Kim, Hanae Otsuka, Hyea-Weon Shiny, Kuniaki Tanaka, Rigoberto C. Advincula, and Hiroaki Usui, Manipulation of Work Function and Surface Free Energy of Tungsten OxideHole Injection Layer Modified with a Self-Assembled Monolayer, Japanese Journal of Applied Physics 50 (2011) 01BB01
7. Sung Kyu Parka, Yong-Hoon Kima and Jeong-In Han, High-resolution patterned nanoparticulate Ag electrodes toward all printed organic thin film transistors, Organic Electronics Volume 10, Issue 6, September (2009), Pages 1102-1108
8. Ryohei Koguchi, Norifumi Kobayashi and Masashi Kijima, Appropriately Conjugated Poly[oligo(N-phenyl-2,7-carbazolylene)-alt-diphenylsilylene]s, Macromolecules, Article ASAP DOI: 10.1021/ma900908b Publication Date (Web) July 2 (2009)
9. Takeshi Mori and Masashi Kijima, Synthesis and electroluminescence properties of carbazole-containing 2,6-naphthalene-based conjugated polymers, European Polymer Journal Volume 45, Issue 4, April 2009, Pages 1149-1157
10. Yusuke Masumoto, Tatsuo Mori,Application of organic bathocuproine-based alloy film to organic light-emitting diodes, Thin Solid Films, Volume 516, Issue 10 ,31 March 2008, Pages 3350-3356
11. Denghui Xu and Chihaya Adachi, Organic light-emitting diode with liquid emitting layer, Applied Physics Letters, 95, 053304 (2009)
12. Bong Kuk Lee, Hea Yeon Lee, Pilnam Kim, Kahp Y. Suh and Tomoji Kawai, Nanoarrays of tethered lipid bilayer rafts on poly(vinyl alcohol) hydrogels, Lab Chip, (2009), 132-139
13. Masahiro Miyauchi, Photocatalysis and photoinduced hydrophilicity of WO3 thin films with underlying Pt nanoparticles, Phys. Chem. Chem. Phys., 10, 6258-6265 (2008)
14. T. Kajiya, D. Kaneko and M. Doi, Dynamical Visualization of “Coffee Stain Phenomenon” in Droplets of Polymer Solution via Fluorescent Microscopy, Langmuir, 24(21), 12369-12374 (2008)
15. A. Kawakami, K. Katsuki, Rigoberto C. Advincula, K. Tanaka, K. Ogino, and H. Usui, Interface Control by Surface-Initiated Deposition Polymerization and Its Application to Organic Light-Emitting Devices, Japanese Journal of Applied Physics Vol. 47, No. 4, pp. 3156_3161, (2008)
16. Tetsu Yonezawa, Tetsuya Itoh, Naoto Shirahata, Yoshitake Masuda, and Kunihito Koumoto, Positioning of cationic silver nanoparticle by using AFM lithography and electrostatic interaction, Applied Surface Science Volume 254, Issue 2, 15 November, Pages 621-626, (2007)
17. T. Mori, Y. Masumoto, Effect of Organic Alloy for Suppression of Polycrystallization in BCP Thin Film, Journal of Photopolymer Science and Technology, Volume19, Number2, 209-214 (2006)
18. 関 成之, 植田 兼司, 坪川 克秀, 近藤 剛史, 王 美涵, 内田 孝幸, 大塚 正男, 澤田 豊, スプレーCVD法で成膜したITO膜を陽極に用いた色素分散型高分子有機EL素子の作製と評価, 高分子論文集, 63, 691 (2006)
19. T. Mori, Y. Iwama, Polycrystallization of a Hole Trasport Material on Indium-Tin-Oxide Substrates, Journal of Photopolymer Science and Technology Volume18, Number1, 59-63 (2005)
20. H. NAKANOTANI, T. OYAMADA, Y. KAWAMURA, H. SASABE, and C. ADACHI, Injection and Transport of High Current Density over 1000 A/cm2 in Organic Light Emitting Diodes under Pulse Excitation, Japanese Journal of Applied Physics, Vol.44, No.6A, 3659-3662 (2005)
21. R. Mogami, M. Fujii, T. Kato, Mechanical Properties of Molecular Assemblies of Cationic Amphiphiles Adsorbed at Solid/Liquid Interfaces, J. Surface Sci. Soc. Jpn.(in Japanese), 25 (7), 422-427 (2004)
22. T. Sakai, K. S.. Song, H. Kanazawa, Y. Nakamura, H. Umezawa, M. Tachiki, H. Kawarada, Ozone-Treated Channel Diamond Field-Effect Transistors, Diam. Relat. Mater., 1971-1975 (2003)
23. H. Sekiguchi, H. Arakawa, H. Taguch, T. Ito, R. Kokawa, A. Ikai, Speific Interaction between GroEL and Denatured Protein Measured by Compression-Free Spectroscopy, Biophysical Journal, 484-490 (2003)
24. J. Chen, M. Mitsuishi, A. Aoki and T. Miyashita, Photocurrent amplification by an energy/electron transfer cascade in polymer Langmuir-Blodgett films, The Royal Society of Chemistry, 2002, 2856-2857, (2002)
25. C. Ganzorig, M. Fujihira, A possible mechanism for enhanced electrofluorescence emission through triplet-triplet annihilation in organic electro luminescent devices, Applied Physics Letters, 272-274 (2002)
26. Y. Masuda, Y. Jinbo, T. Yonezawa,K. Koumoto, Templated Site-Selective Deposition of Titanium Dioxide on Self-Assembled Monolayers, Chem.Master, 1236-1241 (2002)
27. C. Ganzorig, K. Kwak, K. Yagi, M. Fujihira, Fine tuning work function of indium tin oxide by surface by surface molecular design: Enhanced hole injection in organic electro luminescent devices, Applied Physics Letters, 272-274 (2001)
28. T. Mori, k. Mori, T. Mizutani, Effect of magnetic field on growth of bianthrone thin films, Thin Solid Films 393, 143-147 (2001)
29. M. Fujihira, Y. Okabe, Y. Tani, M. Furugori, U. Akiba, A novel cleaning method of gold-coated atomic force microscope tips for their chemical modification, ultramicroscopy, 181-191 (2000)
30. T. Seki, T. Fukuchi, and K. Ichimura, Humidity Sensitive Characteristic Stacking of Azobenzene in Monolayer of Urea Amphiphile on Hydrophilic Surface, Langmuir, 3564-3567 (2000)
31. T. Mori, k. Mori, T. Mizutani, Effect of magnetic field on growth of p-quaterphenyl thin films, Thin Solid Films 366, 279-283 (2000)
32. T. Mori, k. Mori, T. Mizutani, Effect of magnetic field on growth of functional organic thin films, Thin Solid Films 338, 300-303 (1999)
33. T. Arai, M. Tomitori, Removal of contamination and oxide layers from UHV-AFM tips, Applied Physics A, S319-S323 (1998)

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