Scientific Instruments
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Conductive thin film production device for electron microscope sample preparation
Osmium Plasma Coater |
Osmium Plasma Coater(OPC) is the plasma coating device that uses the DC
glow discharge method to coat conductive thin film mainly for SEM samples. |
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Regular Maintenance（1 year inspection） is recommended.
We recommend that you replace the O-ring once every six months.
If the following problems occur, maintenance is required.
Osmium Plasma Coater
・The ultimate vacuum Value is worse than before.
Osmium Reservoir
・The gas introduction knob becom hard to turn.
・The O-ring attached to the ampoule cap is crushed.
・It has been more than 6 months since last regular maintenance.
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Ampoule Cap |
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To those who wish, regular maintenance information can be available by
mail on your designated month each year. To do so, please register by mail. |
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O-ring replacement is recommended once in half a year. |
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作業内容 |
| Osmium Plasma Coater |
Replacement of internal parts of electromagnetic valve and O-rings; Vacuum
leak inspection |
| Osmium Reservoir |
Replacement of O-Rings; Vacuum leak inspection |
| Rotary Pump |
Replacement of oil for rotary pump, oil mist trap filter and adsorption
filter for replacement |
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If any deterioration or damage other than the regular replacement parts is confirmed during the inspection and/or maintenance, a notice and a quote for the parts will be sent separately. |
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