Scientific Instruments
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Removal of organic contamination by the dual effect of ozone and ultraviolet
light at two wavelengths
UV Ozone Cleaner |
※The damage-free dry cleaning method can remove the organic contaminations
that stick to the substrates by a photochemical oxidation resolution process. |
 Straight tube UV lamp series
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Straight tube UV lamp |
【Lineup】
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Straight tube UV lamp - Standard type
UV253V8/UV253V8R |
By connecting oxygen pipe and nitrogen pipe and setting the flow rate of
each gas in advance, the device can perform the following steps automatically.
Oxygen introduction → UV cleaning → Nitrogen introduction (ozone exhaust).
The device chamber is an airtight construction that can maintain a pressure
of 0.02 MPa.
Digital timer with count down function.
Fused quartz specifications (UV253V8) and synthetic quartz specifications
(UV253V8R) are available.
※Ozone Killer (Ozone decomposing device) is an optional device. |
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Straight tube UV lamp - Handheld model
UV253MINI |
UV253MINI is a compact UV ozone cleaner which works with a simple operation
and has reasonable price. This handy and compact cleaner not only performs
general UV ozone cleaning but also helps you develop new applications.
You can select fused quartz sleeve or synthetic quartz sleeve for UV lamps
depending on your application.
*Synthetic quartz has higher transmittance of UV at 185nm wavelength than
fused quartz, which may greatly improve efficiency of UV cleaning.
We can offer customization or dedicated sample holders for your specific
needs. Please contact us for further information. |
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【How to use UV253MINI】
| Make sure to use UV253MINI together with local exhaust ventilation(e.g.
fume hood) to avoid exposure to ozone gas. |
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Place your workpiece on a petri dish or sample stage. |
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Cover the dish or stage with UV253MINI, and turn it on to start UV cleaning. |
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Straight tube UV lamp - 12 inch wafer compatible type
UV253V12/UV253V12R |
It is a large type compatible with 12 inch wafers.
Digital timer with count down function.
Fused quartz specifications (UV253V12) and synthetic quartz specifications
(UV253V12R) are available.
Ozone killer (ozone decomposing device) is a standard feature and there
is no risk of ozone leakage.
When connecting to a gas cylinder, the device can perform the following
steps automatically without the inflow of external air.
Oxygen introduction → UV cleaning → Nitrogen introduction (ozone exhaust). |
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Straight tube UV lamp - 16 inch wafer compatible type
UV253V16/UV253V16R |
It is a large type compatible with 16 inch wafers.
Digital timer with count down function.
Fused quartz specifications (UV253V16) and synthetic quartz specifications
(UV253V16R) are available.
Ozone killer (ozone decomposing device) is a standard feature and there
is no risk of ozone leakage.
When connecting to a gas cylinder, the device can perform the following
steps automatically without the inflow of external air.
Oxygen introduction → UV cleaning → Nitrogen introduction (ozone exhaust). |
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【Specification】
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◆UV Ozone Cleaner（Straight tube UV lamp） Compact Standard type
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| Product |
Straight tube UV lamp
(Fused quartz)
Standard type |
Straight tube UV lamp
(Synthetic quartz)
Standard type |
| 型式 |
UV253V8 |
UV253V8R |
Light
Source |
Type |
Low pressure mercury lamp
(fused quartz) |
Low pressure mercury lamp
(Synthetic quartz) |
| Shape |
Straight tube type |
| Number of lamps |
3 |
| Wavelength |
184.9nm, 253.7nm |
| Cleaning room dimensions |
204(W)×207(D)×142(H)mm |
| External dimensions |
400(W)×300(D)×260(H)mm |
| Frequency |
50Hz/60Hz（Manual switching type） |
| Power supply |
100-240V 4A |
| UV intensity |
5.2mW/cm2 （Per UV lamp） |
| Optional devices |
Ozone killer, flow meter |
| Oxygen timer |
Digital type |
| UV timer |
Digital type |
| Nitrogen timer (ozone exhaust) |
Digital type |
| Ozone killer interlocking |
Equipped |
Interlock
mechanism
（Door switch） |
UV lamp
off |
Equipped |
Solenoid
valve shut
off |
Equipped |
| UV lamp timer |
Not equipped |
Ozone killer
(Ozone decomposing device) |
Optional feature
（Specification/Price） ⇒Details
| Model |
UV253-OZ |
| Ozone removal method |
Catalyst |
| Power supply |
100-240V 1A |
| Air pump exhaust flow rate |
6L/min. |
| External dimensions |
400(W)×300(W)×120(H)mm |
| Price |
Ask for a quote |
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| Price |
Ask for a quote |
Ask for a quote |
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◆UV Ozone Cleaner（Straight tube UV lamp） Handheld model
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| Model |
Straight tube UV lamp
Handheld model
（Fused quartz） |
Straight tube UV lamp
Handheld model
（Synthetic quartz） |
| Product Number |
UV253MINI |
UV253MINIR |
| UV lamp |
Type |
Low pressure mercury,
fused quartz sleeve |
Low pressure mercury,
synthetic quartz sleeve |
| Shape |
Straight tube |
| Number of lamps |
1 |
| Wavelength |
184.9nm, 253.7nm |
Chamber dimensions
(without the UV lamp) |
130(W)×77(D)×38(H)mm |
| Distance between a bottom of the chamber and the UV lamp |
20mm |
| Dimensions |
180(W)×80(D)×85(H)mm |
| Power supply |
AC 100-240V 0.5A 50/60Hz |
UV light intensity
(at wavelength 253nm) |
5.2mW/cm2 |
| Ozone concentration |
Approx. 50 ppm* |
| Price |
Ask for a quote |
Ask for a quote |
*UV light intensity or ozone concentrations may be varied depending on
the measurement method, environment, etc. |
◆UV Ozone Cleaner（Straight tube UV lamp） 12/16 inch wafer compatibel type
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| Product |
12 inch wafer compatible type (Straight tube UV lamp / Fused quartz) |
12 inch wafer compatible type (Straight tube UV lamp / Synthetic quartz) |
16 inch wafer compatible type (Straight tube UV lamp / Fused quartz) |
16 inch wafer compatible type (Straight tube UV lamp / Synthetic quartz) |
| Model |
UV253V12 |
UV253V12R |
UV253V16 |
UV253V16R |
Light
source |
Type |
Low pressure mercury lamp (Fused quartz) |
Low pressure mercury lamp (Synthetic quartz) |
Low pressure mercury lamp (Fused quartz) |
Low pressure mercury lamp (Synthetic quartz) |
| Shape |
Straight tube type |
| Number of lamps |
5 |
5 |
7 |
7 |
| Wavelength |
184.9nm, 253.7nm |
| Cleaning room demensions |
335(W)×330(D)×128(H)mm |
438(W)×430(D)×130(H)mm |
| External demensions |
530(W)×510(D)×270(H)mm |
630(W)×600(D)×280(H)mm |
| Frequency |
50Hz/60Hz |
| Power supply |
JP - 100V 5A
Other country - Please inquire |
| UV intensity |
5.2mW/cm2 （Per UV lamp） |
| Optional devices |
Ozone killer, flow meter, equipment mounted wagon |
| Oxygen timer |
Digital type |
| UV timer |
Digital type |
| Nitrogen timer (ozone exhaust) |
Digital type |
| Ozone killer interlocking power outlet |
Equipped |
Interlock
mechanism
（Door switch） |
UV lamp
off |
Equipped |
Solenoid
valve shut
off |
Equipped |
| UV lamp timer |
Not equipped |
Ozone killer
(Ozone decomposing device) |
Equipped
（Specification）
※1 ozone killer is equipped.
Ozone removal method： Catalyst
Power supply：
JP - 100V 1.5A
Other country - Please inquire
Air pump exhaust flow rate： 18L/min.
External dimensions：
530(W)×510(D)×120(H)mm |
Equipped
（Specification）
※2 ozone killer is equipped.
Ozone removal method： Catalyst
Power supply：
JP - 100V 1.5A
Other country - Please inquire
Air pump exhaust flow rate： 12L/min.
External dimensions：
312(W)×600(D)×120(H)mm |
| Price |
Ask for a quote |
Ask for a quote |
Ask for a quote |
Ask for a quote |
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◆Optional Devices
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（Related information）
⇒ Principal and merits of the dry cleaning method (UV ozone cleaning)
Here
⇒ Publication and technical information Here
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