Products Guide What's New!(JP)　Products(About Us)　Catalogue　　　　 Company Profile Profile　Map　Contact Us　Business Partner　License・Patent(JP) Home＞Scientific Instruments＞UV Ozone Cleaner＞Products Lineup＞High density high power grid UV lamp seires Japanese Scientific Instruments UV Ozone Cleaner + Products details + Product Lineup - Straight tube UV lamp series - High density high power grid UV lamp seires - Optional Devices - Customized Specification + Technical data Osmium Plasma Coater Vacuum Electron Staining Apparatus Removal of organic contamination by the dual effect of ozone and ultraviolet light at two wavelengths UV Ozone Cleaner Products details / Product Lineup / Technical data ※The damage-free dry cleaning method can remove the organic contaminations that stick to the substrates by a photochemical oxidation resolution process. Product Lineup Straight tube UV lamp series / High density high power grid UV lamp seires/ Optional Devices / Customized Specification High density high power grid UV lamp seires High density high power grid UV lamp 【Lineup】 High density high power grid UV lamp - Standard type UV253H/UV253HR This device uses a grid type UV lamp as the lamp, and achieves high-power irradiation and high-density uniform irradiation. It is a device that has taken over the basic structure of the highly proven UV253V8. Digital timer with count down function. Fused quartz specifications (UV253H) and synthetic quartz specifications (UV253HR) are available. Ozone Killer (ozone decomposing device) is a standard feature and there is no risk of ozone leakage. By connecting oxygen pipe and nitrogen pipe and setting the flow rate of each gas in advance, the device can perform the following steps automatically. Oxygen introduction → UV cleaning Nitrogen introduction (ozone exhaust) . High density high power grid UV lamp - 12 inch wafer compatible type UV253H12/UV253H12R It is large type compatible with a 12 inch wafer equipped with a high density high power grid UV lamp.. Digital timer with count down function. Fused quartz specifications (UV253H12) and synthetic quartz specifications (UV253H12R) are available. Ozone Killer (ozone decomposing device) is a standard feature and there is no risk of ozone leakage. By connecting oxygen pipe and nitrogen pipe and setting the flow rate of each gas in advance, the device can perform the following steps automatically. Oxygen introduction → UV cleaning Nitrogen introduction (ozone exhaust) . High density high power grid UV lamp - 16 inch wafer compatible type UV253H16/UV253H16R It is large type compatible with a 16 inch wafer equipped with a high density high power grid UV lamp.. Digital timer with count down function. Fused quartz specifications (UV253H16) and synthetic quartz specifications (UV253H16R) are available. Ozone Killer (ozone decomposing device) is a standard feature and there is no risk of ozone leakage. By connecting oxygen pipe and nitrogen pipe and setting the flow rate of each gas in advance, the device can perform the following steps automatically. Oxygen introduction → UV cleaning Nitrogen introduction (ozone exhaust) . ※It is device that can be demonstrated at Filgen headquarters. ※The wagon equipped with the device shown in the picture is optional. 【Specification】 ◆UV Ozone Cleaner (High density high power grid UV lamp) Compact Standard type Product High density high power grid UV lamp （Fused quartz） Standard type High density high power grid UV lamp （Synthetic quartz） Standard type Model UV253H UV253HR Light source Type Low pressure mercury lamp (fused quartz) Low pressure mercury lamp (Synthetic quartz) Shape High density hight power grid UV lamp Wavelength 184.9 nm, 253.7 nm   Cleaning room dimensions 208(W)×205(D)×168(H) mm External demensions 400(W)×370(D)×270(H) mm Frequency - Power supply 　　JP - 100V 5A Other country - Please inquire UV intensity 28mW/cm2 Optional devices Ozone Killer, flow meter   Oxygen timer Digital type UV timer Digital Type（Share with oxygen timer） Nitrogen timer (ozone exhaust) Digital type Ozone Killer interlocking power outlet Equipped Interlock mechanism (Door switch) UV lamp off Equipped Solenoid valve shut off Equipped UV lamp timer Digital type Ozone Killer (ozone decomposing device) ⇒Details Equipped (Specification) ・Power supply: 　　JP - 100V 1A 　　Other country - Please inquire ・Air pump exhaust flow rate: 6L/min ・External dimensions: 400(W)×370(D)×120(H) mm Price Ask for a quote Ask for a quote ◆UV Ozone Cleaner (Hight density high power grid UV lamp) 12/16 inch wafer compatible type Product 12 inch wafer compatible type (High density high power grid UV lamp / Fused quartz) 12 inch wafer compatible type (High density high power grid UV lamp / Synthetic quartz) 16 inch wafer compatible type (High density high power grid UV lamp / Fused quartz) 16 inch wafer compatible type (High density high power grid UV lamp / Synthetic quartz) Model UV253H12 UV253H12R UV253H16 UV253H16R Light source Type Low pressure mercury lamp (Fused quartz) Low pressure mercury lamp (Synthetic quartz) Low pressure mercury lamp (Fused quartz) Low pressure mercury lamp (Synthetic quartz) Shape High density high power grid UV lamp Wavelength 184.9 nm, 253.7 nm Cleaning room dimensions 335(W)×330(D)×168(H) mm 438(W)×430(D)×160(H) mm External demensions 530(W)×510(D)×480(H) mm 630(W)×600(D)×480(H) mm Frequency - Power supply 　　JP - 100V 15A 　　Other country - Please inquire 　　JP - 100V 23A 　　Other country - Please inquire UV intensity 28mW/cm2 Optional devices Ozone Killer, flow meter, equipment mounted wagon Oxygen timer Digital type UV timer Digital Type（Share with oxygen timer） Nitrogen timer (ozone exhaust) Digital type Ozone Killer interlocking power outlet Equipped Interlock mechanism (Door switch) UV lamp off Equipped Solenoid valve shut off Equipped UV lamp timer Digital type Ozone Killer (ozone decomposing device) ⇒Details Equipped (Specification) ・Power supply: 　　JP - 100V 1.5A 　　Other country - Please inquire ・Air pump exhaust flow rate: 18L/min ・External dimensions: 　530(W)×510(D)×120(H) mm Equipped × 2 units (Specification) ・Power supply: 100V 1.5A 　　JP - 100V 1.5A 　　Other country - Please inquire ・Air pump exhaust flow rate: 18L/min ・External dimensions: 　530(W)×510(D)×120(H) mm Price Ask for a quote Ask for a quote Ask for a quote Ask for a quote ◆Other Optional Devices ⇒Optional Devices 【Inquiries】 Reagent & Scientific Instrument Dept. 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