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Scientific Instruments

UV Ozone Cleaner
+ Products details
+ Product Lineup
- Straight tube UV lamp series
- High density high power grid UV lamp seires
- Optional Devices
Ozone Killer
Ozone Detecting System
Door lock Mechanism
Flow Meter with Stand
Cleaning Room Temperature Measuring Mechine
- Customized Specification
+ Technical data
Osmium Plasma Coater
Vacuum Electron Staining Apparatus

Removal of organic contamination by the dual effect of ozone and ultraviolet light at two wavelengths
UV Ozone Cleaner
Products details / Product Lineup / Technical data

※The damage-free dry cleaning method can remove the organic contaminations that stick to the substrates by a photochemical oxidation resolution process.

Optional Devices
Ozone Killer /Ozone Detecting System / Door lock Mechanism / Flow Meter with Stand / Cleaning Room Temperature Measuring Mechine


Ozone Killer


【Overview】
It is an ozone decomposing device.
By connecting to an ozone killer, the UV ozone cleaner can be used in facilities without exhaust systems.
Connection with the gas piping tubes are using one-touch joints.
When the ozone killer is connected to the interlock outlet of the UV osone cleaner, the power will be automatically turned off after ozone is exhausted.
The ozone killer is designed specifically for each UV ozone cleaner model. Thus, the size is the same and does not require extra space.

【Customization suggestions for users using UV ozone cleaning systems made by other companies】
Users who use UV ozone cleaning systems made by other companies can also use our ozone killer.
We can make special specifications tailored to your UV ozone cleaner.
Please feel free to contact us if you have any trouble with ozone exhaust.

(Examples)
Exhaust application for UV irradiation equipment manufactured by other companies.
Exhaust application for excimer irradiation equipment.

【Specification】

Model UV253-OZ
Ozone Removing Method Catalyst
Power Supply JP - 100V 1A
Other country - Please inquire.
Air Pump Exhaust Flow Rate 6L/min.
Compatible Models UV253V8(R)
External Dimensions 400(W)×300(D)×110(H)mm
Price Ask for a quote
※When apply on UV253V16(R) and UV253H16(R), two ozone killer units are required.


Ozone Detecting System

This system measures the ozone concentration in the cleaning room after the using of ozone killer.
After confirming that the ozone concentration in the cleaning room is safe, it is possible to open the door.
Interlock with the door lock mechanism.

Installation after UV ozone cleaner introduction is also possible.
Please contact us for the details of applicable UV ozone cleaner models.


Model UV253-OZDITECT
Price Ask for a quote


Door Lock Mechanism


The dedicated lock mechanism prevents the door from being opened while the UV lamp is on (during ozone generation).
In addition, it can be used more safely by interlocking with the ozone detecting system.

Installation after UV ozone cleaner introduction is also possible.
Please contact us for the details of applicable UV ozone cleaner models.


Specification  
A Door lock pin DOWN switch
B Door lock pin UP switch 
C Door lock pin 

Model UV253-OZLOCK
Price Ask for a quote


Flow Meter with Stand

Front
Model:UV253-OFMV
Model:UV253-NFMV
Back
Model:UV253-OFMV
Model:UV253-NFMV

【Overview】
The flow meter can be placed on the UV ozone cleaner, since it has a piece of magnet.
The flow meter can be fixed to the work bench with its 4 screw holes.
Connection with the gas piping tubes are using one-touch joints.
The gas flow can be adjusted with the flow adjustment valve.

【Specification】

Without Flow Adjustment Valve With Flow Adjustment Valve
Model UV253-OFMV UV253-NFMV UV253-OFMV UV253-NFMV
Gas oxygen nitrogen oxygen nitrogen
Compatible Models UV253V8 / UV253V8R / UV253H / UV253HR
Input side Fitting connector (for outer diameter 6mm tube)
Output side Fitting connector (for outer diameter 6mm tube)
Scale of the flow meter 0~10L/min.
Price Ask for a quote Ask for a quote


Cleaning Room Temparature Measuring Machine


It displays the temperature in the cleaning room.

Cleaning Room Temperature Measuring Machine
Model UV253V16-TM
External Dimensions 190(W)×600(D)×120(H)mm
Price Ask for a quote
洗浄室内温度測定機

Inquiries Scientific Instruments Dept.: si-support@filgen.jp P.+81-52-624-4388 https://filgen.jp/
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