Scientific Instruments
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Removal of organic contamination by the dual effect of ozone and ultraviolet
light at two wavelengths
UV Ozone Cleaner |
※The damage-free dry cleaning method can remove the organic contaminations
that stick to the substrates by a photochemical oxidation resolution process. |
 Ozone Killer
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【Overview】
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It is an ozone decomposing device. |
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By connecting to an ozone killer, the UV ozone cleaner can be used in facilities
without exhaust systems. |
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Connection with the gas piping tubes are using one-touch joints. |
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When the ozone killer is connected to the interlock outlet of the UV osone
cleaner, the power will be automatically turned off after ozone is exhausted. |
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The ozone killer is designed specifically for each UV ozone cleaner model.
Thus, the size is the same and does not require extra space. |
【Customization suggestions for users using UV ozone cleaning systems made
by other companies】
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Users who use UV ozone cleaning systems made by other companies can also
use our ozone killer. |
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We can make special specifications tailored to your UV ozone cleaner. |
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Please feel free to contact us if you have any trouble with ozone exhaust. |
（Examples）
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Exhaust application for UV irradiation equipment manufactured by other
companies. |
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Exhaust application for excimer irradiation equipment. |
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【Specification】
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| Model |
UV253-OZ |
| Ozone Removing Method |
Catalyst |
| Power Supply |
JP - 100V 1A
Other country - Please inquire. |
| Air Pump Exhaust Flow Rate |
6L/min. |
| Compatible Models |
UV253V8(R) |
| External Dimensions |
400(W)×300(D)×110(H)mm |
| Price |
Ask for a quote |
※When apply on UV253V16(R) and UV253H16(R), two ozone killer units are
required. |
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 Ozone Detecting System
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This system measures the ozone concentration in the cleaning room after
the using of ozone killer.
After confirming that the ozone concentration in the cleaning room is safe,
it is possible to open the door.
Interlock with the door lock mechanism.
Installation after UV ozone cleaner introduction is also possible.
Please contact us for the details of applicable UV ozone cleaner models.
| Model |
UV253-OZDITECT |
| Price |
Ask for a quote |
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 Door Lock Mechanism
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The dedicated lock mechanism prevents the door from being opened while
the UV lamp is on (during ozone generation).
In addition, it can be used more safely by interlocking with the ozone
detecting system.
Installation after UV ozone cleaner introduction is also possible.
Please contact us for the details of applicable UV ozone cleaner models.
| Specification |
| A |
Door lock pin DOWN switch |
| B |
Door lock pin UP switch |
| C |
Door lock pin |
| Model |
UV253-OZLOCK |
| Price |
Ask for a quote |
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Flow Meter with Stand
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Front
Model：UV253-OFMV
Model：UV253-NFMV
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Back
Model：UV253-OFMV
Model：UV253-NFMV |
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【Overview】
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The flow meter can be placed on the UV ozone cleaner, since it has a piece
of magnet. |
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The flow meter can be fixed to the work bench with its 4 screw holes. |
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Connection with the gas piping tubes are using one-touch joints. |
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The gas flow can be adjusted with the flow adjustment valve. |
【Specification】
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Without Flow Adjustment Valve |
With Flow Adjustment Valve |
| Model |
UV253-OFMV |
UV253-NFMV |
UV253-OFMV |
UV253-NFMV |
| Gas |
oxygen |
nitrogen |
oxygen |
nitrogen |
| Compatible Models |
UV253V8 / UV253V8R / UV253H / UV253HR |
| Input side |
Fitting connector (for outer diameter 6mm tube) |
| Output side |
Fitting connector (for outer diameter 6mm tube) |
| Scale of the flow meter |
0～10L/min. |
| Price |
Ask for a quote |
Ask for a quote |
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Cleaning Room Temparature Measuring Machine
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It displays the temperature in the cleaning room.
Cleaning Room Temperature Measuring Machine
| Model |
UV253V16-TM |
| External Dimensions |
190(W)×600(D)×120(H)mm |
| Price |
Ask for a quote |
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