Scientific Instruments
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Removal of organic contamination by the dual effect of ozone and ultraviolet
light at two wavelengths
UV Ozone Cleaner |
※The damage-free dry cleaning method can remove the organic contaminations
that stick to the substrates by a photochemical oxidation resolution process. |
UV Ozone Cleaner
Straight tube UV lamp series |
Straight tube UV lamp series
（Lamp characteristics）
・Fast reaching the peak of the emission intensity.
・High stability of the luminescence intensity.
・Ralative less heat generation.
・Low cost
⇒Detailed info (Specification・Price,etc.) |
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UV Ozone Cleaner
High density high power grid UV lamp series |
High density high power grid UV lamp series.
（Lamp characteristics）
・Strong emission intensity.
・Uniform emission intensity in the light-emitting surface.
・More heat generation, which lead to high temperature in the cleaner.
⇒Detailed info (Specification・Price, etc.) |
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◆Ozone Killer (ozone decomposing device)
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Remove the ozone and exhaust the gas from the cleaner. |
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◆Ozone detection system
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Measure the ozone concentration in the cleaning room after using the ozone
killer.
The door will be able to open after confirming the ozone concentration
fulfills the safety standard.
Interlock with the door lock mechanism. |
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◆Door lock mechanism
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The dedicated lock mechanism prevents the door from being opened while
the UV lamp is on (during ozone generation). |
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| ◆Flow meter with stand |
◆Cleaning room temperature measuring mechine
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Indicates the temperature in the cleaning room. |
⇒Detailed info (Specification・Price, etc.) |
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We have produced various UV ozone cleaners with customized specifications
according to customer requirements. Please click the link below to see
some of the examples.
⇒Detailed info (Specification・Price, etc.) |
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