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Scientific Instruments

UV Ozone Cleaner
+ Products details
+ Product Lineup
- Straight tube UV lamp series
- High density high power grid UV lamp seires
- Optional Devices
- Customized Specification
Light Quantity Up Specification of Compact Standard Type(Staraight Tube UV Lamp)
Specification of Large Type with wide size(Straight Tube UV Lamp)
Double-sided Illumination Specification
Eximer Lamp Specification
Additional Heater Specification
Built-in Ozone Decomposition System by Ozone-free UV lamps
+ Technical data
Osmium Plasma Coater
Vacuum Electron Staining Apparatus

Removal of organic contamination by the dual effect of ozone and ultraviolet light at two wavelengths
UV Ozone Cleaner
Products details / Product Lineup / Technical data

※The damage-free dry cleaning method can remove the organic contaminations that stick to the substrates by a photochemical oxidation resolution process.

Customized Specification
Light Quantity Up Specification of Compact Standard Type(Staraight Tube UV Lamp) / Specification of Large Type with wide size(Straight Tube UV Lamp) / Double-sided Illumination Specification / Eximer Lamp Specification / Additional Heater Specification / Additional Heater Specification / Built-in Ozone Decomposition System by Ozone-free UV lamps


Eximer Lamp Specification / UV172-EX


Easy light cleaning with an excimer lamp.
It has a digital timer with count down function.



Main Unit

Product UV ozone cleaner Excimer Lamp Specificaiton
Model UV172-EX
Light source Type Excimer Lamp
Shape Straight tube type
Number of lamps 4
Wavelength 172 nm
Cleaning room dimensions 338(W)×410(D)×170(H) mm
External dimensions 580(W)×530(D)×580(H) mm
Powe supply JP - 100V
Other country - Please inquire
Optional devices flow meter, equipment mounted wagon
UV timer Digital Type
Nittogen timer (ozone exhaust) Digital type
Ozone Killer interlocking power outlet Equipped
Interlock
mechanism
(Door switch)
UV lamp off Equipped
Solenoid valve shut off Equipped
Price Ask for a quote
Please feel free to contact us for the details of flow meter, equipment mounted wagon.
The method of measuring the UV intensity depends on the lamp. Please contact us for details.
Ozone Killer is a necessary item for model UV172-EX.

Ozone Killer

Product Ozone Killer
Model UV253H12-OZ
Ozone Removing Method Catalyst
Power Supply JP - 100V 1.5A
Other country - Please inquire
Air Pump Exhaust Flow Rate 18L/min.
External Dimensions 530(W)×510(D)×120(H) mm
Price Ask for a quote
Details of Ozone Killer (ozone decomposing device)


(Related information)
 ⇒ Principal and merits of the dry cleaning method (UV ozone cleaning)

 ⇒ Publication and technical information

【Inquiries】
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Phone +81-52-624-4388
https://filgen.jp/
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