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HomeScientific InstrumentsUV Ozone CleanerProducts LineupCustomized Specification>Built-in Ozone Decomposition System by Ozone-free UV lamps
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Scientific Instruments

UV Ozone Cleaner
+ Products details
+ Product Lineup
- Straight tube UV lamp series
- High density high power grid UV lamp seires
- Optional Devices
- Customized Specification
Light Quantity Up Specification of Compact Standard Type(Staraight Tube UV Lamp)
Specification of Large Type with wide size(Straight Tube UV Lamp)
Double-sided Illumination Specification
Eximer Lamp Specification
Additional Heater Specification
Built-in Ozone Decomposition System by Ozone-free UV lamps
+ Technical data
Osmium Plasma Coater
Vacuum Electron Staining Apparatus

Removal of organic contamination by the dual effect of ozone and ultraviolet light at two wavelengths
UV Ozone Cleaner
Products details / Product Lineup / Technical data

※The damage-free dry cleaning method can remove the organic contaminations that stick to the substrates by a photochemical oxidation resolution process.

特別仕様
Light Quantity Up Specification of Compact Standard Type(Staraight Tube UV Lamp) / Specification of Large Type with wide size(Straight Tube UV Lamp) / Double-sided Illumination Specification / Eximer Lamp Specification / Additional Heater Specification / Built-in Ozone Decomposition System by Ozone-free UV lamps


Built-in Ozone Decomposition System by Ozone free UV lamps


【Benefits】

Fully automated:
Ozone decomposition process will be automatically started after completion of UV-Ozone cleaning.
Keep clean:
UV light emitted from ozone-free lamps can keep chamber clean until completion of whole process※ with standard model, UV lamps will be off during ozone decomposition process and inert gas supply is necessary for keeping chamber clean.
No airflow:
There is no air flow source (eg. fans, air pumps); could be used for very light samples (eg. powders).
Gas-tight chamber (proof pressure: 0.02MPa)
Digital countdown timers
  Note: Required time for ozone decomposition depends on the ozone concentration in chamber.
about 1 hr with more than 1,100 ppm initial ozone concentration inside chamber.
 

Time to Ozone decomposition

【Specifications】

Product UV Ozone Cleaner
with fused quartz UV lamps
/built-in ozone decomposition system
UV Ozone Cleaner
with synthetic quartz UV lamps
/built-in ozone decomposition system
Light source
(cleaning)
Type Low pressure mercury lamp
(fused quartz)
 
Low pressure mercury lamp
(synthetic quartz)
 
Shape Straight tube  
Number of lamps 3
Wavelength 184.9nm, 253.7nm   
Light source
(ozone decomposition)
Type Low pressure mercury lamp (ozone-free) 
Shape Straight tube
Number of lamps 2
Wavelength 253.7nm   
Chamber demensions 204(W)×207(D)×142(H)mm 
External dimensions 400(W)×300(D)×260(H)mm 
Power supply JP: 100V 50/60Hz 5A
Other countries: Inquiry
 
Peak UV intensity 5.2mW/cm2 *per lamp 
O2 timer  (digital)
UV/Ozone timer  (digital)
Ozone decomposition timer  (digital)
Safety interlocking UV lamps
Gas supplies
(solenoids)
Operation time integration meter ×
Price Ask for a quote Ask for a quote
 ※Note: The UV intensity depends on conditions in testing.


(Related information)
 ⇒ Principal and merits of the dry cleaning method (UV ozone cleaning)

 ⇒ Publication and technical information

【Inquiries】
Reagent & Scientific Instrument Dept.
Phone +81-52-624-4388
https://filgen.jp/
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