Scientific Instruments
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Removal of organic contamination by the dual effect of ozone and ultraviolet
light at two wavelengths
UV Ozone Cleaner |
※The damage-free dry cleaning method can remove the organic contaminations
that stick to the substrates by a photochemical oxidation resolution process. |
Additional Heater Specification
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A dedicated heater heats the object to be cleaned and makes the organic
contaminants on it easier to be removed.
The height of the stage is adjustable. (10 to 100 mm)
The built-in temperature sensor can measure the temperature of the stage.
Installation to an existing UV ozone cleaner is possible.
Please contact us for the compatible UV ozone cleaner models.
Heater controller |
Heater |
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Example of setting the heater |
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【Specification】
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Working temperature |
Up to 200℃ |
Stage size |
180 × 180 mm |
Height adjustment |
10 ~ 100 mm |
Power supply |
JP - 100V 10A
Other country - Please inquire. |
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【Price】
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(Related information)
⇒ Principal and merits of the dry cleaning method (UV ozone cleaning)
⇒ Publication and technical information
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