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Scientific Instruments

UV Ozone Cleaner
+ Products details
+ Product Lineup
- Straight tube UV lamp series
- High density high power grid UV lamp seires
- Optional Devices
- Customized Specification
Light Quantity Up Specification of Compact Standard Type(Staraight Tube UV Lamp)
Specification of Large Type with wide size(Straight Tube UV Lamp)
Double-sided Illumination Specification
Eximer Lamp Specification
Additional Heater Specification
Built-in Ozone Decomposition System by Ozone-free UV lamps
+ Technical data
Osmium Plasma Coater
Vacuum Electron Staining Apparatus

Removal of organic contamination by the dual effect of ozone and ultraviolet light at two wavelengths
UV Ozone Cleaner
Products details / Product Lineup / Technical data

※The damage-free dry cleaning method can remove the organic contaminations that stick to the substrates by a photochemical oxidation resolution process.

Customized Specification
Light Quantity Up Specification of Compact Standard Type(Staraight Tube UV Lamp) / Specification of Large Type with wide size(Straight Tube UV Lamp) / Double-sided Illumination Specification / Eximer Lamp Specification / Additional Heater Specification / Built-in Ozone Decomposition System by Ozone-free UV lamps


Additional Heater Specification

A dedicated heater heats the object to be cleaned and makes the organic contaminants on it easier to be removed.
The height of the stage is adjustable. (10 to 100 mm)
The built-in temperature sensor can measure the temperature of the stage.

Installation to an existing UV ozone cleaner is possible.
Please contact us for the compatible UV ozone cleaner models.


Heater controller Heater

Example of setting the heater

【Specification】
Working temperature Up to 200℃
Stage size 180 × 180 mm
Height adjustment 10 ~ 100 mm
Power supply JP - 100V 10A
Other country - Please inquire.

【Price】
Please contact us.


(Related information)
 ⇒ Principal and merits of the dry cleaning method (UV ozone cleaning)

 ⇒ Publication and technical information

【Inquiries】
Reagent & Scientific Instrument Dept.
Phone +81-52-624-4388
https://filgen.jp/
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