Scientific Instruments
|
|
Conductive thin film production device for electron microscope sample preparation
Osmium Plasma Coater |
Osmium Plasma Coater (OPC)
is the plasma coating device that uses the D.C. glow discharge method to coat
conductive thin film mainly for SEM samples.
*OPC60A (switch type) will be discontinued from production and sales as
of November 2023. Maintenance, repairs and other support will continue
to be handled (scheduled to end in 2033).
*If you are considering upgrading to the successor model OPC-EVO , please contact us. |
| Conductive ultra-thin film mechanism |
Conductive ultra thin film deposition mechanism can be optionally installed
on standard type.
In addition, it is possible to attach an option to a device(compatible
model) that has already been used.
Optional mounting is possible with the following 3 patterns.
・Low current system only
・Mixed gas system only
・Both Low current system and Mixed gas system
The Mixed gas system of the conductive ultra-thin film mechanism and the
hydrophilization treatment mechanism can not be installed at the same time.
In addition, the external dimensions and weight of the main unit change
with the optional installation.
（Please contact us for details.）
The film forming method used for the conductive thin film mechanism is patented by 「Filgen, Inc.」.
Patent
name |
Conductive ultra thin film mechanism
(low current method) |
Patent
number |
No. 5419723 |
Title of
invention |
Plasma film forming method of conductive thin film |
|
|
 |
 Comparison of 「Both Low current system and Mixed gas system」 mounting
type
and 「Low current system」 mounting type
|
OPC80T-LM equipped with
both Low current system and Mixed gas system
|
OPC80T-L equipped with
Low current system |
 |
The OPC80T-LM is a standard type of Osmium plasma coater with a Low current
system and Mixed gas system additionally installed.
Anyone can use the OPC80T-LM to reproducibly deposit about 0.5 to 3nm of
ultra-thin osmium film.
You can also deposit without opotion systems. |
|
 |
The OPC80T-L is standard type of Osmium plasma coater with a low current
system additionally installed.
Anyone can use the OPC80T-LM to reproducibly deposit about 0.5 to 3nm of
ultra-thin osmium film.
You can also deposit without opotion systems. |
|
⇒Technical data「Osmium ultra thin film-Cross-sectional image of plasma-polymerized
film by TEM」 |
 Low current system and Mixed gas system
|
| ●Low current system |
The low current system uses the method of forming a film with a low discharge
current using a method of applying a voltage from a high vacuum state where
the concentration of OsO4 gas is low and glow discharge does not start. |
| ●Mixed gas system |
The mixed gas system reduces the concentration of OsO4 gas by mixing an
inert gas into the OsO4 gas, and facilitates the control of ultra thin
film deposition by reducing the deposition growth rate.
It is also possible to discharge using only inert gas, and it has scalability
to applications such as etching. |
|
 Price
|
【Price When installing an optional mechanism at the same time as purchasing
a new divice】
|
| Optional mechanism |
Compatible models |
Model name
after mounting option |
Price |
Low current system
of conductive ultra thin film mechanism |
OPC80T |
OPC80T-L |
Ask for a quote |
| OPC60A |
OPC60A-L |
Discontinued |
Mixed gas system
of conductive ultra thin film mechanism |
OPC80T |
OPC80T-M |
Ask for a quote |
Both Low current system
and Mixed gas system
of conductive ultra thin film mechanism |
OPC80T |
OPC80T-LM |
Ask for a quote |
| ※ |
The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed at the same time. |
|
|
|
【Price when installing the optional mechanism on the device already delivered】
|
| Optional mechanism |
Compatible models |
Model name
after mounting option |
Price |
Low current system
of conductive ultra thin film mechanism |
OPC80/OPC80T |
OPC80-L/OPC80T-L |
Ask for a quote |
| OPC60/OPC60A |
OPC60-L/OPC60A-L |
Discontinued |
Mixed gas system
of conductive ultra thin film mechanism |
OPC80/OPC80T |
OPC80-M/OPC80T-M |
Ask for a quote |
Both Low current system
and Mixed gas system
of conductive ultra thin film mechanism |
OPC80/OPC80T |
OPC80-LM/OPC80T-LM |
Ask for a quote |
| ※ |
The Mixed gas system of the conductive ultra-thin film mechanism and the
hydrophilization treatment mechanism can not be installed at the same time. |
| ※ |
If you want to add an optional mechanism to the delivered device, we will
send you a cardboard or alminum case for packing. Please put it in and
send it back. |
| ※ |
The above prices do not include shipping charges. |
|
|
|
