Scientific Instruments
|
|
Conductive thin film production device for electron microscope sample preparation
Osmium Plasma Coater |
Osmium Plasma Coater (OPC)
is the plasma coating device that uses the D.C. glow discharge method to coat
conductive thin film mainly for SEM samples.
*OPC60A(switch type) will be discontinued from production and sales as
of November 2023.
|
| Touch Panel Models / OPC-EVO |
 Product Details
|
Filgen has sold more than 300 osumium plasma coaters, which are pretreatment
equipment for SEM observation.
Osmium Plasma Coater EVO(touch panel model), the successor to OPC60A, inherits
the most important features of Osmium Plasma Coater, such as safety and
reproducibillity of film thickness, and realizes user-friendly and intutive
operation by touch panel, making it safe and easy to use even for first-time
operators. In addition, new functions and expansion mechanisms that were
previously considered optional are now included as standard equipment,
achieving a major evolution. |
 Feature
|
◆Ultra-thin film formation mechanism(patented technology that realizes
highly reproducible film formation from 0.5nm) as standard equipment
|
 |
◆Automatic operation by simply setting the film thickness and starting
|
※Automatic operation is available in normal mode(3nm and above).
When using the ultra-thin film forming mechanism, some manual adjustments
are required. |
|
 |
◆Language Settings
|
Japanese or English can be selected.
This is also suitable for people from overseas. |
|
 |
◆Built-in repetitive mode： Os coating iterations can be set
|
※The number of Os coating repetitions can be specified. |
|
◆Restrict users by setting passwords
|
Secutiry is enhanced by restricting who can use the system. |
|
◆Log(date, film thickness conditions, etc.)
|
Past coating conditions can be checked. |
|
◆Maintenance information Guide
|
Notification of periodic oil and filter changes. |
|
◆Equipped with a hydrophilization treatment mecanism(capable of forming
a thin osmium film with higher adhesion) as standard.
|
|
 Comparison with OPC60A (switch model)
| |
Standard Models（Main Unit）
|
| Models |
OPC-EVO (touch panel model) |
OPC60A (switch model) |
Operation
description |
Touch panel
(Janapese and English compatible) |
Paper manual |
Film thickness
control |
Achieved by automatic control of discharge time and discharge current |
Repretitive
mode |
Auto |
Manual |
Conductive
ultra-thin film
mechanism |
Standard |
Option(additional cost) |
Hydrophilization
treatment
mechanism |
Standard |
Option(additional cost) |
| Maintenance |
The touch panel screen informs you when it is time to replace the rotary
pump oil and filter |
Users need to manage it themselves |
| Security |
Password can be set |
No |
| Safety |
Clears environmental standards with our unique osmium trap filter (standard
equipment on rotary pumps) |
|
|
 Specification
| |
Touch Panel Models（Main Unit）
|
| Models |
OPC-EVO (touch panel model) |
| Overview |
 |
| detail |
Excellent repeatability in producing Osmium thin film of several nm to
several handred nm.
Supports up to Samples of 36mm(φ)x14mm(H) SEM sample. |
| Gas reaction vessel |
Glass container
120(φ)x73(H) mm |
| Maximum sample size |
33(W)x33(D)x4(H) mm
or
36(φ)x14(H)mm |
| Film thickness that can be generated |
0.5nm ～ several 100nm |
| Setting of minimum film thickness |
Use Conductive
Ultra thin film mode： 0.1nm～
Normal mode： 1nm～ |
| Thin films that can be produced |
Osmium film |
| Osmium Reservoir |
Detachable structure with a window to check the remaining amount (When
the reservoir is at fully closed state, it can be removed and ready for
cryopreservation.) |
| Gas introduction method |
Sublimate OsO4 crystal in a dedicated reservoir |
Cathode plate for
SEM Consumables |
Cathode plate for large samples
(10mmφx7） or (15mmφx4) or (36mmφx1) |
| Power supply |
Single-phase AC100V 50/60Hz 10A
(Includes rotary pump power supply) |
| External dimension |
400(w)x350(D)x330(H) mm |
| Weight |
about 20kg |
|
|
Rotary pump（with OsO4 filter）
|
| Models |
Osmium film Only Model
OPC-EVO |
| Power supply |
AC100V 50Hz(60Hz) 200W |
| Full load current |
Single-phase 5.6A(4.8A) |
| Exhaust speed |
50L(60L) /min. |
| External dimension |
170(W)×400(L)×580（H)mm |
| Weight |
about 18kg |
|
|
Price/Main Unit + Rotary pump
|
| Models |
OPC-EVO with Rotary pump |
| Price |
Ask for a quote |
|
|
|
