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Scientific Instruments

UV Ozone Cleaner
Osmium Plasma Coater
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MgO crystals
Human Lymphocyte
Barium Titanate
Ant
Rat Liver
Chicken Leg Tendon
Resist Hole
Silicon Wafer
Protective film for FIB
Silicon under FIB
Cross sectional TEM image alternately laminated film
Trench observation of silicon wafer
Conductive ultra-thin film coating mechanism Hydrophilization treatment
Naphthalene - Osmium Hybrid coating
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Vacuum Electron Staining Apparatus


Conductive thin film production device for electron microscope sample preparation
Osmium Plasma Coater
Product details/Lineup/Accessories/Technical data/Contract service/Maintenance

Osmium Plasma Coater(OPC) is the plasma coating device that uses the DC glow discharge method to coat conductive thin film mainly for SEM samples.
オスミウム・プラズマコーター オスミウムコーター


Technical data

SEM images
MgO crystals/Human Lymphocyte/Barium Titanate/Ant/Rat Liver/Chicken Leg Tendon/Resist Hole/Silicon Wafer
Others
Protective film for FIB/Silicon under FIB/Cross sectional TEM image alternately laminated film/Trench observation of silicon wafer/Conductive ultra-thin film coating mechanism Hydrophilization treatment/Naphthalene - Osmium Hybrid coating


Cross sectional TEM image alternately laminated film

The repeatability of the film thickness was confirmed by alternately laminating the osmium ultra-thin film and the plasma-polymerized film.

■Sample:Epoxy block Size:10mmφ×3mmt

Condition1
Plasma-polymerized film and osmium film are alternately coated on epoxy block with low current method.
Each setting film thickness is as follows.
  Naphthalene  10nm  6 layers
  Osmium      1nm  5 layers
Re-embedded epoxy block with epoxy resin
After cross-sectioning with an ultramicrotome, perform TEM observation.
Condition2
Plasma-polymerized film and osmium film are alternately coated on epoxy block by mixed gas method.
Each setting film thickness is as follows.
  Naphthalene  10nm  7 layers
  Osmium      1nm  6 layers(*)
(*However, only the 4th layers was discharged for 4 seconds without mixed gas.)
Re-embedded epoxy block with epoxy resin
After cross-sectioning with an ultramicrotome, perform TEM observation


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