Scientific Instruments
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Conductive thin film production device for electron microscope sample preparation
Osmium Plasma Coater |
Osmium Plasma Coater(OPC) is the plasma coating device that uses the DC
glow discharge method to coat conductive thin film mainly for SEM samples. |
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Technical data
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SEM images
Others
Cross sectional TEM image alternately laminated film |
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The repeatability of the film thickness was confirmed by alternately laminating
the osmium ultra-thin film and the plasma-polymerized film.
■Sample:Epoxy block Size:10mmφ×3mmt
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Condition1
① |
Plasma-polymerized film and osmium film are alternately coated on epoxy
block with low current method.
Each setting film thickness is as follows.
Naphthalene 10nm 6 layers
Osmium 1nm 5 layers |
② |
Re-embedded epoxy block with epoxy resin |
③ |
After cross-sectioning with an ultramicrotome, perform TEM observation. |
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⇒ |
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Condition2
① |
Plasma-polymerized film and osmium film are alternately coated on epoxy
block by mixed gas method.
Each setting film thickness is as follows.
Naphthalene 10nm 7 layers
Osmium 1nm 6 layers(*)
(*However, only the 4th layers was discharged for 4 seconds without mixed
gas.)
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② |
Re-embedded epoxy block with epoxy resin |
③ |
After cross-sectioning with an ultramicrotome, perform TEM observation |
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⇒ |
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