Scientific Instruments
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Conductive thin film production device for electron microscope sample preparation
Osmium Plasma Coater |
Osmium Plasma Coater(OPC) is the plasma coating device that uses the DC
glow discharge method to coat conductive thin film mainly for SEM samples. |
![オスミウム・プラズマコーター オスミウムコーター](../../Filgen/OPC/opc-image.gif) |
Technical data
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SEM images
Others
Naphthalene - Osmium Hybrid coating |
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By coating a plasma-polymerized membrane in front of the osmium coat, it
is possible to increase the strength of the sample, which can prevent charge-up
and separation between the sample and the embedding resin.
This Coating method is patented.
It is particularly effective when coating on fluororesins.
![](hybrid.jpg) |
■Sample:Fluororesin sheet,Size:32mm(φ)×1mm(H)
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1. The sample was coated with osmium.
![](../../Filgen/OPC/hybrid1.JPG) |
Film thickness:100nm |
Film thickness:150nm |
Film thickness:200nm |
※As the film thickness becomes thicker, Osmium is coated except for the
masked part(round part surrounded by dotted line), but there is unevenness. |
2. Each was coated with osmium and plasma-polymerized films.
![](../../Filgen/OPC/hybrid2.JPG) |
Osmium film:150nm |
![](../../Filgen/OPC/hybrid3.JPG) |
Plasma-polymerized film:150nm |
※The plasma-polymeraized film(Made from Naphthalene crystals) is uniformly
coated except for the masked part.
3. After coating the plasma-polymerized film, it was coated with Osmium
film.
![](../../Filgen/OPC/hybrid4.JPG) |
Plasma-polymerized film:100nm |
![](../../Filgen/OPC/hybrid5.JPG) |
Naphthalene-Osmium Hybrid coating |
《Plasma-polymerized film:150nm》
+《Osmium film:50nm》 |
※An osmium film is uniformly coated on a sample that has been coated with
a plasma-polymerized membrane in advance. |
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■SEM image
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Fluororesin sheet, Size:5×4×0.3mm
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![](../../Filgen/OPC/hybrid81.JPG) |
View large image
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![](../../Filgen/OPC/hybrid9.JPG) |
Osmium film:5nm |
![](../../Filgen/OPC/hybrid102.JPG) |
View large image
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![](../../Filgen/OPC/hybrid11.JPG) |
Naphthalene - Osmium Hybrid coating
《Plasma-polymerized film:2nm》
+《Osmium film:3nm》 |
※By using the naphthalene-osmium hybrid coat, observation is possible without
electron beam damage and without charge up. |
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