製品・サービス情報
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電子顕微鏡試料用 導電性薄膜作製装置
オスミウム・プラズマコーター |
「直流グロー放電による負グロー相領域内でのプラズマ製膜法」を用いた、主にSEM試料用の導電性薄膜作製装置です。
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Direct Magnification: 10,000X |
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Direct Magnification: 100,000X |
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Coating Device |
Osmium Plasma Coater |
Coating Material |
Osmium |
Coating Thickness |
3 nm |
Accelerating Voltage |
10.0 kV |
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Direct Magnification: 10,000X |
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Direct Magnification: 100,000X |
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Coating Device |
Magnetron Sputter |
Coating Material |
Pt-Pd |
Coating Thickness |
3 nm |
Accelerating Voltage |
10.0 kV |
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Direct Magnification: 10,000X |
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Direct Magnification: 100,000X |
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Coating Device |
Ion Beam Sputter |
Coating Material |
W |
Coating Thickness |
1.5 nm |
Accelerating Voltage |
10.0 kV |
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